TEM and TEM-EDX Analysis of Cross-section of TiO<sub>2</sub> Thin Film and Glass Substrate

YU Xingang; MA Hongwen; LUO Wuwen; ZHOU Ao; KOU Qinghua; ZHAO Huifeng

Volume 4 Issue 2

Jun. 1997

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Article Navigation > International Journal of Minerals, Metallurgy and Materials > 1997 > 4(2): 55-56

YU Xingang, MA Hongwen, LUO Wuwen, ZHOU Ao, KOU Qinghua, and ZHAO Huifeng, TEM and TEM-EDX Analysis of Cross-section of TiO₂ Thin Film and Glass Substrate, J. Univ. Sci. Technol. Beijing, 4(1997), No. 2, pp. 55-56.

Cite this article as:

YU Xingang, MA Hongwen, LUO Wuwen, ZHOU Ao, KOU Qinghua, and ZHAO Huifeng, TEM and TEM-EDX Analysis of Cross-section of TiO2 Thin Film and Glass Substrate, J. Univ. Sci. Technol. Beijing, 4(1997), No. 2, pp. 55-56.

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TEM and TEM-EDX Analysis of Cross-section of TiO₂ Thin Film and Glass Substrate

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Received: 30 December 1996

Abstract

Abstract

TiO₂ thin film was deposited on Na-Ca-Si glass substrate by sol-gel process. TEM observation showed that the film is compactly joined to the substrate. TEM-EDX analyses of the film, film-substrate interface, and substrate revealed that the diffusion of Na⁺ from the substrate to the film is negative diffusion.
- thin film;
- sol-gel;
- titania;
- diffusion