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Volume 27 Issue 5
May  2020

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Yan-zhao Guo, Jin-long Liu, Jiang-wei Liu, Yu-ting Zheng, Yun Zhao, Xiao-lu Yuan, Zi-hao Guo, Li-fu Hei, Liang-xian Chen, Jun-jun Wei, Jian-peng Xing, and Cheng-ming Li, Comparison of α particle detectors based on single-crystal diamond films grown in two types of gas atmospheres by microwave plasma-assisted chemical vapor deposition, Int. J. Miner. Metall. Mater., 27(2020), No. 5, pp. 703-712. https://doi.org/10.1007/s12613-019-1944-0
Cite this article as:
Yan-zhao Guo, Jin-long Liu, Jiang-wei Liu, Yu-ting Zheng, Yun Zhao, Xiao-lu Yuan, Zi-hao Guo, Li-fu Hei, Liang-xian Chen, Jun-jun Wei, Jian-peng Xing, and Cheng-ming Li, Comparison of α particle detectors based on single-crystal diamond films grown in two types of gas atmospheres by microwave plasma-assisted chemical vapor deposition, Int. J. Miner. Metall. Mater., 27(2020), No. 5, pp. 703-712. https://doi.org/10.1007/s12613-019-1944-0
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研究论文

基于两种不同气体条件下微波等离子体辅助化学气相沉积制备的单晶金刚石薄膜的α粒子探测器的比较

  • Research Article

    Comparison of α particle detectors based on single-crystal diamond films grown in two types of gas atmospheres by microwave plasma-assisted chemical vapor deposition

    + Author Affiliations
    • Chemical vapor deposition (CVD)-grown diamond films have been developed as irradiation-resistant materials to replace or upgrade current detectors for use in extreme radiation environments. However, their sensitivity in practical applications has been inhibited by space charge stability issues caused by defects and impurities in pure diamond crystal materials. In this study, two high-quality CVD-grown single-crystal diamond (SCD) detectors with low content of nitrogen impurities were fabricated and characterized. The intrinsic properties of the SCD samples were characterized using Raman spectroscopy, stereomicroscopy, and X-ray diffraction with the rocking curve mode, cathode luminescence (CL), and infrared and ultraviolet-visible-near infrared spectroscopies. After packaging the detectors, the dark current and energy resolution under α particle irradiation were investigated. Dark currents of less than 5 pA at 100 V were obtained after annealing the electrodes, which is comparable with the optimal value previously reported. The detector that uses a diamond film with higher nitrogen content showed poor energy resolution, whereas the detector with more dislocations showed poor charge collection efficiency (CCE). This demonstrates that the nitrogen content in diamond has a significant effect on the energy resolution of detectors, while the dislocations in diamond largely contribute to the poor CCE of detectors.

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