ZnO纳米结构的设计与钙钛矿光吸收调制

司浩楠; 赵璇; 廖庆亮; 张跃

doi:10.1007/s12613-023-2808-1

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Haonan Si, Xuan Zhao, Qingliang Liao, and Yue Zhang, Design and tailoring of patterned ZnO nanostructures for perovskite light absorption modulation, Int. J. Miner. Metall. Mater.,(2024). https://doi.org/10.1007/s12613-023-2808-1

Cite this article as:

Haonan Si, Xuan Zhao, Qingliang Liao, and Yue Zhang, Design and tailoring of patterned ZnO nanostructures for perovskite light absorption modulation, Int. J. Miner. Metall. Mater.,(2024). https://doi.org/10.1007/s12613-023-2808-1

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研究论文

ZnO纳米结构的设计与钙钛矿光吸收调制

1)
北京科技大学前沿交叉科学技术研究院, 北京材料基因工程高精尖创新中心, 北京 100083, 中国
2)
北京科技大学后摩尔时代芯片关键材料与器件教育部重点实验室, 新能源材料与技术北京市重点实验室, 北京 100083, 中国

文章亮点

(1) 系统研究了光刻工艺参数对图案化纳米结构的影响规律。

(2) 构建高度可调且密度可控的高质量图案化ZnO阵列。

(3) 阐明了纳米结构与光伏器件性能的构效关系。

中文摘要

光刻技术是一种关键的微纳加工技术，可以实现微纳尺度的精确制造，在电子、信息、能源、催化等领域发挥着重要的作用。本文旨在构建高质量的图案化氧化锌纳米结构，通过优化光刻工艺参数，成功制备了线形和孔洞排列的氧化锌纳米棒阵列。图案化氧化锌阵列高度可调且密度可控，其三维空间结构与大比表面积增加了光捕获能力与电荷输运性能，有助于实现钙钛矿太阳能电池的高效能量转换。光刻工艺的有效管理对于设计和制造具有出色性能的复杂纳米结构和器件提供重要指导。

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Research Article

Design and tailoring of patterned ZnO nanostructures for perovskite light absorption modulation

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Abstract

Abstract

Lithography is a pivotal micro/nanomanufacturing technique, facilitating performance enhancements in an extensive array of devices, encompassing sensors, transistors, and photovoltaic devices. The key to creating highly precise, multiscale-distributed patterned structures is the precise control of the lithography process. Herein, high-quality patterned ZnO nanostructures are constructed by systematically tuning the exposure and development times during lithography. By optimizing these parameters, ZnO nanorod arrays with line/hole arrangements are successfully prepared. Patterned ZnO nanostructures with highly controllable morphology and structure possess discrete three-dimensional space structure, enlarged surface area, and improved light capture ability, which achieve highly efficient energy conversion in perovskite solar cells. The lithography process management for these patterned ZnO nanostructures provides important guidance for the design and construction of complex nanostructures and devices with excellent performance.
- lithography;
- patterned zno nanorod arrays;
- light absorption;
- perovskite solar cell

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References(34)

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ZnO纳米结构的设计与钙钛矿光吸收调制

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Design and tailoring of patterned ZnO nanostructures for perovskite light absorption modulation

Abstract

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