Relationship between texture and residual macro-strain in CVD diamond films based on phenomenological analysis

Weimin Mao, Hongxi Zhu, Leng Chen, Huiping Feng

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    Weimin Mao, Hongxi Zhu, Leng Chen, and Huiping Feng, Relationship between texture and residual macro-strain in CVD diamond films based on phenomenological analysis, J. Univ. Sci. Technol. Beijing , 15(2008), No. 2, pp.197-201. https://dx.doi.org/10.1016/S1005-8850(08)60038-9
    Weimin Mao, Hongxi Zhu, Leng Chen, and Huiping Feng, Relationship between texture and residual macro-strain in CVD diamond films based on phenomenological analysis, J. Univ. Sci. Technol. Beijing , 15(2008), No. 2, pp.197-201. https://dx.doi.org/10.1016/S1005-8850(08)60038-9
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    Materials

    Relationship between texture and residual macro-strain in CVD diamond films based on phenomenological analysis

    • School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China

    • State Key Laboratory of Advanced Metals and Materials, University of Science and Technology Beijing, Beijing 100083, China

    基金项目: 

    This work was financially supported by the National Natural Science Foundation of China (No.50372007).

      通信作者:

      Weimin Mao E-mail: wmmao@mater.ustb.edu.cn

    中文摘要

    The relationship between texture and elastic properties of chemical vapor deposition (CVD) diamond films was analyzed based on the phenomenological theory, which reveals the influence of crystalline orientation and texture on the residual macro-strain and macro-stress. The phenomenological calculations indicated that the difference in Young's modulus could be 15% in single diamond crystals and 5% in diamond films with homogeneously distributed strong fiber texture. The experimentally measured residual strains of free-standing CVD diamond films were in good agreement with the correspondingly calculated Young's modulus in connection with the multi-fiber textures in the films, though the difference in Young's modulus induced by texture was only around 1%. It is believed that texture should be one of the important factors influencing the residual stress and strain of CVD diamond films.

     

    Materials

    Relationship between texture and residual macro-strain in CVD diamond films based on phenomenological analysis

    Author Affilications

      • School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China

      • State Key Laboratory of Advanced Metals and Materials, University of Science and Technology Beijing, Beijing 100083, China

    • Funds: 

      This work was financially supported by the National Natural Science Foundation of China (No.50372007).

    • Received: 27 April 2007;
    The relationship between texture and elastic properties of chemical vapor deposition (CVD) diamond films was analyzed based on the phenomenological theory, which reveals the influence of crystalline orientation and texture on the residual macro-strain and macro-stress. The phenomenological calculations indicated that the difference in Young's modulus could be 15% in single diamond crystals and 5% in diamond films with homogeneously distributed strong fiber texture. The experimentally measured residual strains of free-standing CVD diamond films were in good agreement with the correspondingly calculated Young's modulus in connection with the multi-fiber textures in the films, though the difference in Young's modulus induced by texture was only around 1%. It is believed that texture should be one of the important factors influencing the residual stress and strain of CVD diamond films.

     

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