Fanxiu Lu, Wubao Yang, Zhilin Liu, Weizhong Tang, and Yumei Tong, Preparation and characterization of nano-crystalline diamond films on glass substrate, J. Univ. Sci. Technol. Beijing, 11(2004), No. 3, pp. 216-220.
Cite this article as:
Fanxiu Lu, Wubao Yang, Zhilin Liu, Weizhong Tang, and Yumei Tong, Preparation and characterization of nano-crystalline diamond films on glass substrate, J. Univ. Sci. Technol. Beijing, 11(2004), No. 3, pp. 216-220.
Fanxiu Lu, Wubao Yang, Zhilin Liu, Weizhong Tang, and Yumei Tong, Preparation and characterization of nano-crystalline diamond films on glass substrate, J. Univ. Sci. Technol. Beijing, 11(2004), No. 3, pp. 216-220.
Citation:
Fanxiu Lu, Wubao Yang, Zhilin Liu, Weizhong Tang, and Yumei Tong, Preparation and characterization of nano-crystalline diamond films on glass substrate, J. Univ. Sci. Technol. Beijing, 11(2004), No. 3, pp. 216-220.
Adherent nano diamond films were successfully deposited on glass substrate by microwave plasma assisted CVD method in H2-CH4 and Ar-CH4 environment. Raman, AFM (Atomic Force Microscope), TEM (Transmission Electron Microscope), FTIR,and Nano Indentation techniques were used for characterization of the obtained nano diamond films. It was found that the average grain size was less than 100 nm with a surface roughness value as low as 2 nm. The nano diamond films were found to have excellent transparency in visible and IR spectrum range, and were as hard as natural diamond. Experimental results were presented.Mechanisms for nano diamond film deposition were discussed.
Adherent nano diamond films were successfully deposited on glass substrate by microwave plasma assisted CVD method in H2-CH4 and Ar-CH4 environment. Raman, AFM (Atomic Force Microscope), TEM (Transmission Electron Microscope), FTIR,and Nano Indentation techniques were used for characterization of the obtained nano diamond films. It was found that the average grain size was less than 100 nm with a surface roughness value as low as 2 nm. The nano diamond films were found to have excellent transparency in visible and IR spectrum range, and were as hard as natural diamond. Experimental results were presented.Mechanisms for nano diamond film deposition were discussed.
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