Carrier transport characteristics of H-terminated diamond films prepared using molecular hydrogen and atomic hydrogen

Jin-long Liu; Liang-xian Chen; Yu-ting Zheng; Jing-jing Wang; Zhi-hong Feng; Cheng-ming Li

doi:10.1007/s12613-017-1469-3

Volume 24 Issue 7

Jul. 2017

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Article Navigation > International Journal of Minerals, Metallurgy and Materials > 2017 > 24(7): 850-856

Jin-long Liu, Liang-xian Chen, Yu-ting Zheng, Jing-jing Wang, Zhi-hong Feng, and Cheng-ming Li, Carrier transport characteristics of H-terminated diamond films prepared using molecular hydrogen and atomic hydrogen, Int. J. Miner. Metall. Mater., 24(2017), No. 7, pp. 850-856. https://doi.org/10.1007/s12613-017-1469-3

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Jin-long Liu, Liang-xian Chen, Yu-ting Zheng, Jing-jing Wang, Zhi-hong Feng, and Cheng-ming Li, Carrier transport characteristics of H-terminated diamond films prepared using molecular hydrogen and atomic hydrogen, Int. J. Miner. Metall. Mater., 24(2017), No. 7, pp. 850-856. https://doi.org/10.1007/s12613-017-1469-3

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Research ArticleOpen Access

Carrier transport characteristics of H-terminated diamond films prepared using molecular hydrogen and atomic hydrogen

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Corresponding author:
Cheng-ming Li E-mail: chengmli@mater.ustb.edu.cn
Received: 30 November 2016; Revised: 15 March 2017; Accepted: 20 March 2017

Abstract

Abstract

The H-terminated diamond films, which exhibit high surface conductivity, have been used in high-frequency and high-power electronic devices. In this paper, the surface conductive channel on specimens from the same diamond film was obtained by hydrogen plasma treatment and by heating under a hydrogen atmosphere, respectively, and the surface carrier transport characteristics of both samples were compared and evaluated. The results show that the carrier mobility and carrier density of the sample treated by hydrogen plasma are 15 cm²·V^-1·s^-1 and greater than 5×10¹² cm^-2, respectively, and that the carrier mobilities measured at five different areas are similar. Compared to the hydrogen-plasma-treated specimen, the thermally hydrogenated specimen exhibits a lower surface conductivity, a carrier density one order of magnitude lower, and a carrier mobility that varies from 2 to 33 cm²·V^-1·s^-1. The activated hydrogen atoms restructure the diamond surface, remove the scratches, and passivate the surface states via the etching effect during the hydrogen plasma treatment process, which maintains a higher carrier density and a more stable carrier mobility.
- H-termination;
- diamond film;
- surface conductivity;
- carrier mobility;
- plasma treatment

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