Interface structure between epitaxial NiSi₂ and Si

The interface structure between the Si and NiSi₂ epitaxially grown on the (112) Si substrate was studied using high resolution transmission electron microscopy and computer image simulation. The results showed that the interface between Si and NiSi₂ epitaxially grown on the (112) Si substrate has six different types:type A NiSi₂ (111)/(111) Si, type A NiSi₂ (001)/(001) Si, type B NiSi₂ (111)/(111) Si, type B NiSi₂ (112)/(112) Si, type B NiSi₂ (221)/(001) Si, and type B NiSi₂ (114)/(110) Si. And there are one or more different atomic structures for one type of interface.