Development of SPM Quantitative Micromorphology Analysis Software

Suozai Li; Libing Liao

Volume 6 Issue 2

Jun. 1999

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Article Navigation > International Journal of Minerals, Metallurgy and Materials > 1999 > 6(2): 136-138

Suozai Li and Libing Liao, Development of SPM Quantitative Micromorphology Analysis Software, J. Univ. Sci. Technol. Beijing, 6(1999), No. 2, pp. 136-138.

Cite this article as:

Suozai Li and Libing Liao, Development of SPM Quantitative Micromorphology Analysis Software, J. Univ. Sci. Technol. Beijing, 6(1999), No. 2, pp. 136-138.

Suozai Li and Libing Liao, Development of SPM Quantitative Micromorphology Analysis Software, J. Univ. Sci. Technol. Beijing, 6(1999), No. 2, pp. 136-138.

Citation:

Suozai Li and Libing Liao, Development of SPM Quantitative Micromorphology Analysis Software, J. Univ. Sci. Technol. Beijing, 6(1999), No. 2, pp. 136-138.

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Automation

Development of SPM Quantitative Micromorphology Analysis Software

Suozai Li and
Libing Liao

+ Author Affiliations

Received: 7 October 1998

Abstract

Abstract

Scanning Probe Microscope (SPM) has great advantages in quantitative micromorphology analysis because of its convenience in obtaining micromorphology information of materials on nanometer or atomic scale under control of a computer. Based on an established SPM quantitative micromorphology analysis model, an SPM image analysis software Which can calculate both two- and three-dimensional micromorphology parameters is developed.
- SPM;
- quantitative micromorphology;
- analysis software