DIAMOND FILMS DEPOSITED AT LOW TEMPERATURES MICROWAVE PLASMA-ASSISTED CVD METHOD

WANG JIANJUN; LU FANXIU; YANG BAOXIONG

Volume 2 Issue 2

Sep. 1995

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Article Navigation > International Journal of Minerals, Metallurgy and Materials > 1995 > 2(2): 79-83

WANG JIANJUN, LU FANXIU, and YANG BAOXIONG, DIAMOND FILMS DEPOSITED AT LOW TEMPERATURES MICROWAVE PLASMA-ASSISTED CVD METHOD, J. Univ. Sci. Technol. Beijing, 2(1995), No. 2, pp. 79-83.

Cite this article as:

WANG JIANJUN, LU FANXIU, and YANG BAOXIONG, DIAMOND FILMS DEPOSITED AT LOW TEMPERATURES MICROWAVE PLASMA-ASSISTED CVD METHOD, J. Univ. Sci. Technol. Beijing, 2(1995), No. 2, pp. 79-83.

WANG JIANJUN, LU FANXIU, and YANG BAOXIONG, DIAMOND FILMS DEPOSITED AT LOW TEMPERATURES MICROWAVE PLASMA-ASSISTED CVD METHOD, J. Univ. Sci. Technol. Beijing, 2(1995), No. 2, pp. 79-83.

Citation:

WANG JIANJUN, LU FANXIU, and YANG BAOXIONG, DIAMOND FILMS DEPOSITED AT LOW TEMPERATURES MICROWAVE PLASMA-ASSISTED CVD METHOD, J. Univ. Sci. Technol. Beijing, 2(1995), No. 2, pp. 79-83.

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DIAMOND FILMS DEPOSITED AT LOW TEMPERATURES MICROWAVE PLASMA-ASSISTED CVD METHOD

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Received: 10 July 1995

Abstract

Abstract

Low-temperature deposition of diamond thin films in the range of 280~445℃ has been successfully carried out by microwave plasma-assisted CVD method.At lower deposition temperatures (280~445℃),the large increase in the nucleation density and great improvement in the average surfae roughness of the diamond were observed. Results of low temperature deposition and characterization of diamond thin films obtained are presented.
- diamond films;
- low-temperature deposition;
- microwave plasma