Dependence of Magnetic Properties and Microstructure of Ni₈₁Fe₁₉ Film on Base Vacuum and Sputtering Pressure

The Ni₈₁Fe₁₉/Ta films with different NiFe thickness were prepared at different base vacuums and sputtering pressures. The results of magnetic measurement and atomic force microscope (AFM) showed that the films prepared at higher base vacuum and lower sputtering pressure had larger △R/R. The reason should be that higher base vacuum and lower sputtering pressure introduce larger grainsize and lower surface roughness, which will weaken the scattering of electrons, reduce the resistance R, and increase △R/R.