Abstract: Bi₂Se₃ thin films were electrochemically deposited on Ti and indium tin oxide-coated glass substrates, respectively, at room temperature, using Bi(NO₃)₃·5H₂O and SeO₂ as starting materials in diluted HNO₃ solution. A conventional three-electrode cell was used with a platinum sheet as a counter electrode, and a saturated calomel electrode was used as a reference electrode. The films were annealed in argon atmosphere. The influence of cold isostatic pressing before annealing on the microstructure and thermoelectric properties of the films was investigated. X-ray diffraction analysis indicates that the film grown on the indium tin oxide-coated glass substrate is pure rhombohedral Bi₂Se₃, and the film grown on the Ti substrate consists of both rhombohedral and orthorhombic Bi₂Se₃.