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Volume 24 Issue 6
Jun.  2017
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文章导航 >  矿物冶金与材料学报（英文）  > 2017  >  24(6): 675-680
Yan-ping Xia, Pei-hong Wang, Shi-wei Shi, Gang He, Miao Zhang, Jian-guo Lü,  and Zhao-qi Sun, Effect of oxygen partial pressure and transparent substrates on the structural and optical properties of ZnO thin films and their performance in energy harvesters, Int. J. Miner. Metall. Mater., 24(2017), No. 6, pp. 675-680. https://doi.org/10.1007/s12613-017-1450-1
Cite this article as:
Yan-ping Xia, Pei-hong Wang, Shi-wei Shi, Gang He, Miao Zhang, Jian-guo Lü,  and Zhao-qi Sun, Effect of oxygen partial pressure and transparent substrates on the structural and optical properties of ZnO thin films and their performance in energy harvesters, Int. J. Miner. Metall. Mater., 24(2017), No. 6, pp. 675-680. https://doi.org/10.1007/s12613-017-1450-1
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研究论文

Effect of oxygen partial pressure and transparent substrates on the structural and optical properties of ZnO thin films and their performance in energy harvesters

  • School of Physics & Materials Science, Anhui University, Hefei 230601, China

  • School of Electronic & Information Engineering, Hefei Normal University, Hefei 230601, China

  • 通讯作者:

    Pei-hong Wang    E-mail: wangpeihong2002@ahu.edu.cn

  • Zinc oxide (ZnO) thin films were deposited onto different substrates-tin-doped indium oxide (ITO)/glass, ITO/polyethylene naphthalate (PEN), ITO/polyethylene terephthalate (PET)-by the radio-frequency (RF) magnetron sputtering method. The effect of various O2/(Ar+O2) gas flow ratios (0, 0.1, 0.2, 0.3, 0.4, 0.5, and 0.6) was studied in detail. ZnO layers deposited onto ITO/PEN and ITO/PET substrates exhibited a stronger c-axis preferred orientation along the (0002) direction compared to ZnO deposited onto ITO/glass. The transmittance spectra of ZnO films showed that the maximum transmittances of ZnO films deposited onto ITO/glass, ITO/PEN, and ITO/PET substrates were 89.2%, 65.0%, and 77.8%, respectively. Scanning electron microscopy (SEM) images of the film surfaces indicated that the grain was uniform. The cross-sectional SEM images showed that the ZnO films were columnar structures whose c-axis was perpendicular to the film surface. The test results for a fabricated ZnO thin film based energy harvester showed that its output voltage increased with increasing acceleration of external vibration.
    • Research Article

    Effect of oxygen partial pressure and transparent substrates on the structural and optical properties of ZnO thin films and their performance in energy harvesters

    + Author Affiliations
      Abstract
    • Zinc oxide (ZnO) thin films were deposited onto different substrates-tin-doped indium oxide (ITO)/glass, ITO/polyethylene naphthalate (PEN), ITO/polyethylene terephthalate (PET)-by the radio-frequency (RF) magnetron sputtering method. The effect of various O2/(Ar+O2) gas flow ratios (0, 0.1, 0.2, 0.3, 0.4, 0.5, and 0.6) was studied in detail. ZnO layers deposited onto ITO/PEN and ITO/PET substrates exhibited a stronger c-axis preferred orientation along the (0002) direction compared to ZnO deposited onto ITO/glass. The transmittance spectra of ZnO films showed that the maximum transmittances of ZnO films deposited onto ITO/glass, ITO/PEN, and ITO/PET substrates were 89.2%, 65.0%, and 77.8%, respectively. Scanning electron microscopy (SEM) images of the film surfaces indicated that the grain was uniform. The cross-sectional SEM images showed that the ZnO films were columnar structures whose c-axis was perpendicular to the film surface. The test results for a fabricated ZnO thin film based energy harvester showed that its output voltage increased with increasing acceleration of external vibration.
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