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Volume 24 Issue 7
Jul.  2017
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文章导航 >  矿物冶金与材料学报（英文）  > 2017  >  24(7): 850-856
Jin-long Liu, Liang-xian Chen, Yu-ting Zheng, Jing-jing Wang, Zhi-hong Feng,  and Cheng-ming Li, Carrier transport characteristics of H-terminated diamond films prepared using molecular hydrogen and atomic hydrogen, Int. J. Miner. Metall. Mater., 24(2017), No. 7, pp. 850-856. https://doi.org/10.1007/s12613-017-1469-3
Cite this article as:
Jin-long Liu, Liang-xian Chen, Yu-ting Zheng, Jing-jing Wang, Zhi-hong Feng,  and Cheng-ming Li, Carrier transport characteristics of H-terminated diamond films prepared using molecular hydrogen and atomic hydrogen, Int. J. Miner. Metall. Mater., 24(2017), No. 7, pp. 850-856. https://doi.org/10.1007/s12613-017-1469-3
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研究论文Open Access

Carrier transport characteristics of H-terminated diamond films prepared using molecular hydrogen and atomic hydrogen

  • Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China

  • Science and Technology on ASIC Laboratory, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China

  • 通讯作者:

    Cheng-ming Li    E-mail: chengmli@mater.ustb.edu.cn

  • The H-terminated diamond films, which exhibit high surface conductivity, have been used in high-frequency and high-power electronic devices. In this paper, the surface conductive channel on specimens from the same diamond film was obtained by hydrogen plasma treatment and by heating under a hydrogen atmosphere, respectively, and the surface carrier transport characteristics of both samples were compared and evaluated. The results show that the carrier mobility and carrier density of the sample treated by hydrogen plasma are 15 cm2·V-1·s-1 and greater than 5×1012 cm-2, respectively, and that the carrier mobilities measured at five different areas are similar. Compared to the hydrogen-plasma-treated specimen, the thermally hydrogenated specimen exhibits a lower surface conductivity, a carrier density one order of magnitude lower, and a carrier mobility that varies from 2 to 33 cm2·V-1·s-1. The activated hydrogen atoms restructure the diamond surface, remove the scratches, and passivate the surface states via the etching effect during the hydrogen plasma treatment process, which maintains a higher carrier density and a more stable carrier mobility.
    • Research ArticleOpen Access

    Carrier transport characteristics of H-terminated diamond films prepared using molecular hydrogen and atomic hydrogen

    + Author Affiliations
      Abstract
    • The H-terminated diamond films, which exhibit high surface conductivity, have been used in high-frequency and high-power electronic devices. In this paper, the surface conductive channel on specimens from the same diamond film was obtained by hydrogen plasma treatment and by heating under a hydrogen atmosphere, respectively, and the surface carrier transport characteristics of both samples were compared and evaluated. The results show that the carrier mobility and carrier density of the sample treated by hydrogen plasma are 15 cm2·V-1·s-1 and greater than 5×1012 cm-2, respectively, and that the carrier mobilities measured at five different areas are similar. Compared to the hydrogen-plasma-treated specimen, the thermally hydrogenated specimen exhibits a lower surface conductivity, a carrier density one order of magnitude lower, and a carrier mobility that varies from 2 to 33 cm2·V-1·s-1. The activated hydrogen atoms restructure the diamond surface, remove the scratches, and passivate the surface states via the etching effect during the hydrogen plasma treatment process, which maintains a higher carrier density and a more stable carrier mobility.
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