Abstract: A series of TaVN-Ag nanocomposite films were deposited using a radio-frequency magnetron sputtering system. The microstructure, mechanical properties, and tribological performance of the films were investigated. The results showed that TaVN-Ag films were composed of face-centered cubic (fcc) TaVN and fcc-Ag. With increasing Ag content, the hardness of TaVN-Ag composite films first increased and then decreased rapidly. The maximum hardness value was 31.4 GPa. At room temperature, the coefficient of friction (COF) of TaVN-Ag films decreased from 0.76 to 0.60 with increasing Ag content from 0 to 7.93at%. For the TaVN-Ag films with 7.93at% Ag, COF first increased and then decreased rapidly from 0.60 at 25℃ to 0.35 at 600℃, whereas the wear rate of the film increased continuously from 3.91×10^-7 to 19.1×10^-7 mm³/(N·mm). The COF of the TaVN-Ag film with 7.93at% Ag was lower than that of the TaVN film, and their wear rates showed opposite trends with increasing temperature.