| Cite this article as: |
Jie Wang, Tengfei Fan, Jianchen Lu, Xiaoming Cai, Lei Gao, and Jinming Cai, Chemical vapor deposition growth behavior of graphene, Int. J. Miner. Metall. Mater., 29(2022), No. 1, pp. 136-143. https://doi.org/10.1007/s12613-021-2302-6
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蔡金明 E-mail: j.cai@kust.edu.cn
前人研究发现石墨烯具有多种形状，包括三角形、矩形、六边形、U形、圆形和树突形。虽然可以通过调整载气（氢气和氩气）的比例定制不同形貌的石墨烯，但甲烷与氢气体积比(CH4/H2)对不同形貌石墨烯形成的影响尚未有系统的报道。分形石墨烯沿着已有的划痕生长已有报道，但仍未发现分形石墨烯以不同角度堆叠的现象。通过调节CH4/H2的体积比从1:50到1:100，我们在多晶铜衬底上通过真空化学气相沉积制备枝晶、矩形和六边形等不同形貌石墨烯，得到了石墨烯的两种主要形态(树枝状和六边形)。由于CH4/H2体积比的变化，观察到结构的对称和不对称现象。同时，研究了在多晶铜衬底上生长的分形石墨烯的演化过程。当石墨烯的平衡生长状态被破坏时，其固有的六边形对称结构将转变为非六边形对称结构。我们系统、全面地研究了在多晶铜上生长的不同形貌石墨烯的演化过程，该演化过程受甲烷与氢气体积比的影响，且可控。此外，还观察到雪花状石墨烯的拼接和不同角度的石墨烯堆叠现象。
The optimized growth parameters of graphene with different morphologies, such as dendrites, rectangle, and hexagon, have been obtained by low-pressure chemical vapor deposition on polycrystalline copper substrates. The evolution of fractal graphene, which grew on the polycrystalline copper substrate, has also been observed. When the equilibrium growth state of graphene is disrupted, its intrinsic hexagonal symmetry structure will change into a non-hexagonal symmetry structure. Then, we present a systematic and comprehensive study of the evolution of graphene with different morphologies grown on solid copper as a function of the volume ratio of methane to hydrogen in a controllable manner. Moreover, the phenomena of stitching snow-like graphene together and stacking graphene with different angles was also observed.
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