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Kerui Song, Zhou Li, Mei Fang, Zhu Xiao, and Qian Lei, Structural and magnetic properties of micropolycrystalline cobalt thin films fabricated by direct current magnetron sputtering, Int. J. Miner. Metall. Mater., 31(2024), No. 2, pp.384-394. https://dx.doi.org/10.1007/s12613-023-2715-5
Kerui Song, Zhou Li, Mei Fang, Zhu Xiao, and Qian Lei, Structural and magnetic properties of micropolycrystalline cobalt thin films fabricated by direct current magnetron sputtering, Int. J. Miner. Metall. Mater., 31(2024), No. 2, pp.384-394. https://dx.doi.org/10.1007/s12613-023-2715-5
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磁控溅射制备的微晶钴薄膜的组织结构及磁性能

摘要: 通过直流磁控溅射法制备了纯钴薄膜,研究了溅射功率和压强对薄膜微观组织结构和电磁性能的影响。随着溅射功率从15 W增加到60 W,钴薄膜由非晶转变为了微晶,同时晶间孔隙宽度显著增加。这导致了电阻率降低65%,矫顽力从162 Oe上升至293 Oe,以及单轴磁各向异性消失。随着溅射压强从1.6 Pa降低至0.2 Pa,晶粒尺寸显著增加,电阻率从377 μΩ⋅cm大幅度降低至37 μΩ⋅cm。同时由于缺陷宽度的增加,矫顽力从67 Oe大幅上升至280 Oe,由此建立了一个通过面缺陷宽度定量计算纯钴薄膜的矫顽力的模型。此外,在0.2 Pa和0.4 Pa的溅射压强下,制备了具有明显的单轴磁各向异性的多晶纯钴薄膜,这种本因在非晶薄膜中出现的现象的产生被归因于高的微观内应力。

 

Structural and magnetic properties of micropolycrystalline cobalt thin films fabricated by direct current magnetron sputtering

Abstract: Pure cobalt (Co) thin films were fabricated by direct current magnetron sputtering, and the effects of sputtering power and pressure on the microstructure and electromagnetic properties of the films were investigated. As the sputtering power increases from 15 to 60 W, the Co thin films transition from an amorphous to a polycrystalline state, accompanied by an increase in the intercrystal pore width. Simultaneously, the resistivity decreases from 276 to 99 μΩ·cm, coercivity increases from 162 to 293 Oe, and in-plane magnetic anisotropy disappears. As the sputtering pressure decreases from 1.6 to 0.2 Pa, grain size significantly increases, resistivity significantly decreases, and the coercivity significantly increases (from 67 to 280 Oe), which can be attributed to the increase in defect width. Correspondingly, a quantitative model for the coercivity of Co thin films was formulated. The polycrystalline films sputtered under pressures of 0.2 and 0.4 Pa exhibit significant in-plane magnetic anisotropy, which is primarily attributable to increased microstress.

 

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