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Dong Li, Jie Kang, Zhiyuan Liu, Yang Zhang, Xiaoli Wang, Xingzhou Su, Tongyu Shi, Xuefeng Yu, Hao Huang, and Yanliang Liu, Interface-bonding integration of perovskite wafer with TFT array for x-ray imaging, Int. J. Miner. Metall. Mater., (2026). https://doi.org/10.1007/s12613-025-3273-9
Dong Li, Jie Kang, Zhiyuan Liu, Yang Zhang, Xiaoli Wang, Xingzhou Su, Tongyu Shi, Xuefeng Yu, Hao Huang, and Yanliang Liu, Interface-bonding integration of perovskite wafer with TFT array for x-ray imaging, Int. J. Miner. Metall. Mater., (2026). https://doi.org/10.1007/s12613-025-3273-9
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基于界面粘结集成的钙钛矿晶片/TFT阵列X射线成像探测器研究

摘要: 金属卤化物钙钛矿因具备优异的X射线吸收能力及良好的载流子输运性能,在直接型X射线探测领域受到广泛关注。为实现高分辨率X射线成像,需将钙钛矿材料与薄膜晶体管(TFT)阵列进行有效集成。然而,烧结型钙钛矿晶片的制备通常涉及高温高压工艺,与TFT阵列耐受性不匹配,传统集成方式(如引线键合、各向异性导电胶键合等)亦存在集成密度低、工艺条件苛刻及像素串扰等问题,制约了钙钛矿X射线成像面板的发展。针对上述问题,本文提出并验证一种基于界面粘结集成的钙钛矿晶片/TFT阵列X射线成像探测器制备策略。采用聚酰亚胺–铯铅溴钙钛矿(PI–CsPbBr3)复合粘结剂作为中间层,通过丝网印刷将其涂覆于TFT基板,并将预烧结的致密CsPbBr3晶片贴合于粘结层之上。在低温退火过程中,粘结层中溶剂对晶片产生渗透作用,诱发界面重构,原位形成均质桥接结构,从而实现钙钛矿晶片与TFT阵列的牢固电学与机械集成。实验结果表明,该探测器对X射线响应灵敏,灵敏度达4310 µC·Gy-1·cm-2,检测限低至442 nGy·s-1。基于64 × 64像素(像素尺寸200 μm × 200 μm)的成像面板可获得清晰成像效果,空间分辨率达2.2 LP·mm-1。本研究为钙钛矿晶片在X射线平板成像中的应用提供了一条工艺简单且高效的集成路径。

 

Interface-bonding integration of perovskite wafer with TFT array for x-ray imaging

Abstract: Metal-halide perovskites have been successfully utilized in high-sensitivity direct X-ray detection, and the further integration of perovskites with pixel chips is crucial for X-ray imaging. In this study, an ingenious interface-bonding strategy is applied to integrate a polycrystalline CsPbBr3 wafer with a thin-film transistor (TFT) array. A polyimide-CsPbBr3 composite binder with satisfactory mechanical adhesion and optoelectronic properties is synthesized and used to integrate a freestanding CsPbBr3 wafer with a TFT array. Under low-temperature annealing, interface reconstruction occurs with the in-situ formation of a homogeneous bridging structure between the CsPbBr3 wafer and TFT array, achieving a multichannel X-ray imaging detector. The X-ray detector exhibits a high sensitivity of 4310 µC·Gy−1·cm−2 and low detection limit of 442 nGy·s−1. The resulting imaging panel with pixels offers a satisfactory spatial resolution (2.2 LP·mm−1) X-ray imaging.

 

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