Abstract: Nanosized tungsten powder was synthesized by means of different methods and under different conditions with nanosized WO₃ powder. The powder and the intermediate products were characterized using XRD, SEM, TEM, BET (Brunauer Emmett Teller Procedure) and SAXS (X-ray diffracto-spectrometer/Kratky small angle scattering goniometer). The results show that nanosized WO₃ can be completely reduced to WO₂ at 600℃ after 40 min, and WO₂ can be reduced to W at 700℃ after 90 min, moreover, the mean size of W particles is less than 40 nm. Furthermore, the process of WO₃→WO₂→W excelled that of WO₃→W in getting stable nanosized tungsten powder with less grain size.