Abstract: Some types of ZnO nanostructures with various shape and size, including tetrapod-like ZnO (T-ZnO) nanorods, nanowiresand nanoribbons, have been obtained by controlled growth process. The nanostructures of ZnO have been investigated by means offield-emission scanning electron microscope, transmission electron microscopy and high-resolution transmission electron micros-copy. The growth mechanisms of various ZnO nanosttrctures were proposed and discussed.