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Volume 5 Issue 1
Mar.  1998
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Wenxia Pan, Fanxiu Lu,  and Toyonobu Yoshida, Characterization of Low Pressure RF Plasma Heating, J. Univ. Sci. Technol. Beijing, 5(1998), No. 1, pp. 31-35.
Cite this article as:
Wenxia Pan, Fanxiu Lu,  and Toyonobu Yoshida, Characterization of Low Pressure RF Plasma Heating, J. Univ. Sci. Technol. Beijing, 5(1998), No. 1, pp. 31-35.
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Materials

Characterization of Low Pressure RF Plasma Heating

  • Compacts of α-Al2O3 and Mo powder were heated in radio-frequency (RF) induced low pressure N2, H2, Ar, and their mixture plasma. An optical pyrometer, a radiation pyrometer, and a system called Accufiber Model 310 were used to measure the temperature of compacts heated in the plasma. The results indicate that there are different heat transfer mechanisms from plasma to specimens of different physical properties. The Ar plasma showed the highest heating ability among N2, H2, and Ar plasma for Al2O3 specimens, whereas the H2 plasma could heat Mo specimens to a higher temperature than the Ar plasma did, even under the same generating conditions.
  • Materials

    Characterization of Low Pressure RF Plasma Heating

    + Author Affiliations
    • Compacts of α-Al2O3 and Mo powder were heated in radio-frequency (RF) induced low pressure N2, H2, Ar, and their mixture plasma. An optical pyrometer, a radiation pyrometer, and a system called Accufiber Model 310 were used to measure the temperature of compacts heated in the plasma. The results indicate that there are different heat transfer mechanisms from plasma to specimens of different physical properties. The Ar plasma showed the highest heating ability among N2, H2, and Ar plasma for Al2O3 specimens, whereas the H2 plasma could heat Mo specimens to a higher temperature than the Ar plasma did, even under the same generating conditions.
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