Shun-hua Xiao and Wei-fen Jiang, Preparation and characterization of barium strontium titanate/silicon nanoporous pillar array composite thin films by a sol-gel method, Int. J. Miner. Metall. Mater., 19(2012), No. 8, pp. 762-767. https://doi.org/10.1007/s12613-012-0625-z
Cite this article as:
Shun-hua Xiao and Wei-fen Jiang, Preparation and characterization of barium strontium titanate/silicon nanoporous pillar array composite thin films by a sol-gel method, Int. J. Miner. Metall. Mater., 19(2012), No. 8, pp. 762-767. https://doi.org/10.1007/s12613-012-0625-z

Preparation and characterization of barium strontium titanate/silicon nanoporous pillar array composite thin films by a sol-gel method

+ Author Affiliations
  • Corresponding author:

    Shun-hua Xiao    E-mail: xiaoshunhua@glite.edu.cn

  • Received: 6 August 2011Revised: 14 October 2011Accepted: 26 October 2011
  • Barium strontium titanate (Ba0.5Sr0.5TiO3, BST)/silicon nanoporous pillar array (Si-NPA) thin films were prepared by a spin-coating/annealing technique based on Si-NPA with micro/nano-structure. Both the isomer conversion of acetylacetone and the network structure combined by enol and Ti-alkoxide facilitate the formation of the BST sol and the subsequent crystallization. Before the perovskite BST begins to form, the intermediate phase (Ba,Sr)Ti2O5CO3 is found. The boundary between BST and Si-NPA is of clarity and little interface diffusion, disclosing that Si-NPA is an ideal template substrate in the preparation of multifunctional composite films.
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