Xiao-zhou Zhang, Yan-ping Xia, Xing Liu, Yi-ming Zhong, Hai-bo Zhao, and Pei-hong Wang, Effect of annealing temperature on the microstructure and optoelectrical properties of ZnO thin films and their application in self-powered accelerometers, Int. J. Miner. Metall. Mater., 26(2019), No. 9, pp. 1186-1193. https://doi.org/10.1007/s12613-019-1828-3
Cite this article as:
Xiao-zhou Zhang, Yan-ping Xia, Xing Liu, Yi-ming Zhong, Hai-bo Zhao, and Pei-hong Wang, Effect of annealing temperature on the microstructure and optoelectrical properties of ZnO thin films and their application in self-powered accelerometers, Int. J. Miner. Metall. Mater., 26(2019), No. 9, pp. 1186-1193. https://doi.org/10.1007/s12613-019-1828-3
Research Article

Effect of annealing temperature on the microstructure and optoelectrical properties of ZnO thin films and their application in self-powered accelerometers

+ Author Affiliations
  • Corresponding author:

    Pei-hong Wang    E-mail: wangpeihong2002@ahu.edu.cn

  • Received: 29 November 2018Revised: 11 February 2019Accepted: 22 February 2019
  • This paper reports a piezoelectric nanogenerator (NG) with a thickness of approximately 80 μm for miniaturized self-powered acceleration sensors. To deposit the piezoelectric zinc oxide (ZnO) thin film, a magnetron sputtering machine was used. Polymethyl methacrylate (PMMA) and aluminum-doped zinc oxide (AZO) were used as the insulating layer and the top electrode of the NG, respectively. The experimental results show that the ZnO thin films annealed at 150℃ exhibited the highest crystallinity among the prepared films and an optical band gap of 3.24 eV. The NG fabricated with an AZO/PMMA/ZnO/stainless steel configuration exhibited a higher output voltage than the device with an AZO/ZnO/PMMA/stainless steel configuration. In addition, the annealing temperature affected the open-circuit voltage of the NGs; the output voltage reached 3.81 V when the annealing temperature was 150℃. The open-circuit voltage of the prepared self-powered accelerometer increased linearly with acceleration. In addition, the small NG-based accelerometer, which exhibited excellent fatigue resistance, can be used for acceleration measurements of small and lightweight devices.
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