Effects of substrate temperature and deposition time on the morphology and corrosion resistance of FeCoCrNiMo_0.3 high-entropy alloy coating fabricated by magnetron sputtering

The effects of substrate temperature and deposition time on the morphology and corrosion resistance of FeCoCrNiMo_0.3 coating fabricated by magnetron sputtering were investigated by scanning electron microscopy and electrochemical tests. The FeCoCrNiMo_0.3 coating was mainly composed of the face-centered cubic phase. High substrate temperature promoted the densification of the coating, and the pitting resistance and protective ability of the coating in 3.5wt% NaCl solution was thus improved. When the deposition time was prolonged at 500°C, the thickness of the coating remarkably increased. Meanwhile, the pitting resistance improved as the deposition time increased from 1 to 3 h; however, further improvement could not be obtained for the coating sputtered for 5 h. Overall, the pitting resistance of the FeCoCrNiMo_0.3 coating sputtered at 500°C for 3 h exceeds those of most of the reported high-entropy alloy coatings.