Wei Shao, Ruixin Ma,  and Bin Liu, Fabrication and properties of ZAO powder,sputtering target materials and the related films, J. Univ. Sci. Technol. Beijing, 13(2006), No. 4, pp. 346-349. https://doi.org/10.1016/S1005-8850(06)60071-6
Cite this article as:
Wei Shao, Ruixin Ma,  and Bin Liu, Fabrication and properties of ZAO powder,sputtering target materials and the related films, J. Univ. Sci. Technol. Beijing, 13(2006), No. 4, pp. 346-349. https://doi.org/10.1016/S1005-8850(06)60071-6
Materials

Fabrication and properties of ZAO powder,sputtering target materials and the related films

+ Author Affiliations
  • Aluminum-doped zinc oxide (ZnO:Al), abbreviated as ZAO, is a novel and widely used transparent conductive material. The ZAO powder was synthesized by chemical coprecipitation. The ZAO ceramic sputtering target materials were fabricated by sintering in air, and ZAO transparent conductive films were prepared by RF magnetron sputtering on glass substrates. XRD proved that such films had an orientation of (002) crystal panel paralleled to the surface of the glass substrate. The average transmittance of the films in the visible region exceeded 80%.
  • loading
  • 加载中

Catalog

    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索

    Share Article

    Article Metrics

    Article Views(234) PDF Downloads(11) Cited by()
    Proportional views

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return