Development of SPM Quantitative Micromorphology Analysis Software

Scanning Probe Microscope (SPM) has great advantages in quantitative micromorphology analysis because of its convenience in obtaining micromorphology information of materials on nanometer or atomic scale under control of a computer. Based on an established SPM quantitative micromorphology analysis model, an SPM image analysis software Which can calculate both two- and three-dimensional micromorphology parameters is developed.