MICROSTRUCTURAL CHARACTERISTICSAND OXIDATION BEHAVIOR OFTi1-xAlxN PVD-COATINGS
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Graphical Abstract
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Abstract
Recent research on microstructural characteristics and oxidation behavior of Ti1-xAlxN thin film were surveyed. The Ti1-xAlxN coatings have three different phase regions, Bl structure for lower x value, wurtzite structure for higher x value and unidentified structure for medium x value. Based upon the selective oxidation mechanism the oxidation results of Ti1-xAlxN thin film with different Ti/Al ratio were predicated.
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