Nanosized tungsten powder was synthesized by means of different methods and under different conditions with nanosized WO3 powder. The powder and the intermediate products were characterized using XRD, SEM, TEM, BET (Brunauer Emmett Teller Procedure) and SAXS (X-ray diffracto-spectrometer/Kratky small angle scattering goniometer). The results show that nanosized WO3 can be completely reduced to WO2 at 600℃ after 40 min, and WO2 can be reduced to W at 700℃ after 90 min, moreover, the mean size of W particles is less than 40 nm. Furthermore, the process of WO3→WO2→W excelled that of WO3→W in getting stable nanosized tungsten powder with less grain size.