Effect of SPM Scanning Range on the Micromorphology Parameters

The surface of a compact disk is analyzed by using SPM and the quantitative micromorphology analysis software SPMIAS developed by the author. Images at the same position but with different scanning ranges are obtained under the same experimental conditions. Micromorphology parameters are calculated and compared, and the relationship between the changing of the scanning range and the changing of micromorphology parameters is summarized.